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  3. Investigation of PZT Materials for Reliable Piezostack Deformable Mirror with Modular Design

Investigation of PZT Materials for Reliable Piezostack Deformable Mirror with Modular Design

  • Автор: Toporovsky V., Samarkin V., Kudryashov A., Galaktionov I., Panich A., Malykhin A.
  • Издательство: Micromachines

  This article presents a study of the electrophysical properties of a piezoceramic material for use in adaptive optics. The key characteristics that may be important for the manufacturing of piezoelectric deformable mirrors are the following: piezoelectric constants (d31, d33, d15), capacitance, elastic compliance values s for different crystal directions, and the dielectric loss tangent (tgδ). Based on PZT ceramics, the PKP-12 material was developed with high values of the dielectric constant, piezoelectric modulus, and electromechanical coupling coefficients. The deformable mirror control elements are made from the resulting material—piezoceramic combs with five individual actuators in a row. In this case, the stroke of the actuator is in the range of 4.1–4.3 microns and the capacitance of the actuator is about 12 nF.

Toporovsky V., Samarkin V., Kudryashov A., Galaktionov I., Panich A., Malykhin A. Investigation of PZT Materials for Reliable Piezostack Deformable Mirror with Modular Design. Micromachines. 2023; 14(11):2004. https://doi.org/10.3390/mi14112004